【摘要】 为了降低超硬TiAlSiN复合涂层的摩擦因数,采用多元等离子体浸没离子注入与沉积和射频(RF)磁控溅射技术制备TiAlSiN/WS2多层薄膜,利用XRD、SEM、Raman光谱、纳米探针、摩擦和电化学试验对薄膜的微结构、力学性能和腐蚀行为进行测试与分析。SEM结果表明:TiAlSiN/WS2多层薄膜具有清晰的调制周期。纳米硬度结果表明,TiAlSiN/WS2多层薄膜硬度介于TiAlSiN和WS2涂层硬度之间。摩擦实验结果证实TiAlSiN/WS2多层薄膜的摩擦因数低于TiAlSiN涂层的,且摩擦过程平稳。此外,TiAlSiN/WS2多层薄膜表现出良好的抗腐蚀能力,在相对较小的调制周期内,其腐蚀电流密度显著降低。更多还原

【Abstract】 To reduce the friction coefficient of the superhard TiAlSiN composite coating, TiAlSiN/WS 2 multilayers were synthesized by multiple plasma immersion ion implantation and deposition as well as radio-frequency (RF) magnetron sputtering. X-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectrum, nano indentation, tribological and electrochemical tests were employed to characterize the microstructure, mechanical properties and corrosion behavior of the as-deposited multilayers. SEM results reveal that the TiAlSiN/WS 2 multilayers have a good periodicity. Nano indentation results show that the nanohardness of TiAlSiN/WS 2 multilayers is between that of the TiAlSiN and WS 2 coatings. Tribological tests prove that the friction coefficient of the TiAlSiN/WS 2 multilayers is lower and more stable than that of the TiAlSiN coating. In addition, the TiAlSiN/WS 2 multilayers show excellent corrosion resistance and the corrosion current density decreases obviously at a relative small modulation period.更多还原