【摘要】 应用闭合磁场非平衡磁控溅射离子镀技术,制备了不同Ti含量的MoS2合金减摩镀层,研究了添加元素Ti含量对镀层厚度、硬度、摩擦系数等的影响规律。结果表明MoS2合金减摩镀层的厚度与添加元素Ti溅射靶的输入功率无关,其硬度随Ti含量增加而提高。不同Ti含量的镀层摩擦系数呈现出不同的变化规律。Ball-on-disc球盘摩擦磨损试验结果显示高载荷时可能因产生转移膜而使摩擦系数呈减小趋势。更多还原

【Abstract】 The MoS2/Ti composite coatings were deposited using closed field unbalanced magnetron sputtering ion plating,on substrates of M42 high speed steel.The impacts of the deposition conditions,such as the Ti content,deposition rate,sputtering power,surface roughness,and film thickness,on the mechanical properties,including friction coefficient,surface hardness,and wear resistance,were experimentally studied.The results show that the Ti content significantly affects the mechanical properties of the MoS2/Ti composite coatings.For example,as Ti content increases,the surface hardness of MoS2 coatings increases at a slowly decreased rate.The friction coefficient in the ball-on-disc test with heavier load decreases possibly because of film transfer.Moreover,the sputtering power of Ti target little influences the MoS2 film thickness.更多还原