【摘要】 在设计微型阀时,关键点之一是对响应时间进行估算。设计一种热气致动双稳态微型阀,应用热电类比方法建立简化模型,对开阀响应时间进行估算。在流量测量的基础上,建立气流升压模型,计算了流经此微型阀的气体填充一定空间所需要的响应时间。分析结果显示:当加热膜片的厚度分别为8μm和25μm时,开阀响应时间分别为11.4ms和20.2ms。在200kPa压强差下,气流在55.5μL空间内的升压响应时间为7.6ms。对微型阀的性能进行测试,证明了热电类比简化模型能够很好的模拟开阀响应时间,气流升压模型能够对微型阀开阀后性能进行很好的估计。更多还原

【Abstract】 Response time estimates are a key factor in the design of a microvalve.A thermopneumatically actuated bistable microvalve was designed with a simplified electrical-thermal model to estimate the microvalve’s opening response time.An equation whose parameters were verified by the flow measurements was used to calculate the pressure-increase response time of the microvalve for a given volume.The results show that the opening response time gives in 11.4 ms with an 8 μm thick heating membrane and 20.2 ms with a 25 μm thick membrane.The pressure-increase response time to fill a 55.5 μL volume takes 7.6 ms with a pressure of 200 kPa.Experiments on the microvalve show that the models accurately estimates both the microvalve opening response time and pressure-increase response time.更多还原