【摘要】 在点阵光刻系统中引入光斑整形技术,依据成像系统的成像原理,将制作在透明掩膜版的任意形状物体成像在光刻面,以实现点阵刻蚀光斑的整形。实验结果表明,通过光斑整形后的图像刻蚀光栅亮度明显优于普通点阵刻蚀系统,光斑的任意整形也可对刻蚀图像进行某些特定的加密。更多还原

【Abstract】 A technology to change the figure of light spot in dot matrix hologram is introduced in this paper.According to the imaging theory,it can be come true to change the figure of light spot by imaging the arbitrary shape what is on the translucent masking on photoresist.It is indicated from the experiment result that the figure changed dot matrix hologram is more bright than common dot matrix hologram,and the figure can be encrypted on the hologram as designed.更多还原