【摘要】 具有体密度的高表面质量金属钼薄膜对材料高压状态方程研究具有十分重要的意义。本文介绍了制备钼薄膜的几种方法,包括:机械轧制、机械研磨抛光、化学气相沉积、电子束蒸发、脉冲激光沉积和磁控溅射。综合比较后认为,采用磁控溅射法制备的钼膜可以基本满足状态方程靶用钼(Mo)薄膜的需要。通过磁控溅射沉积方法可以制备出表面质量高,厚度可达几微米的金属Mo薄膜,其组织结构和密度接近块材而且薄膜表面不易出现硬化、沾污等问题。更多还原

【Abstract】 Molybdenum film with theoretical density plays an important role in the Equation of state of materials for ultra high pressure research. In this paper, current preparative techniques of molybdenum thin-film are summarized, including mechanical methods, chemical vapor deposition(CVD), electron beam evaporation, pulsed laser deposition and magnetron sputtering. Comparing these preparation techniques, magnetron sputtering is the best one to satisfy the need of the Equation of state of materials. As there is low surface roughness and no surface hardening or surface contamination etc by magnetron sputtering technique, it is the most suitable preparation approach.更多还原