【摘要】 利用射频磁控溅射方法,在石英表面上制备了具有良好的c轴取向的纳米ZnO薄膜。室温下,在300 nm激发下,在450 nm附近观测到ZnO薄膜的蓝光发射谱(430~460 nm)。分析了气氛中氧气与氩气比对薄膜质量及蓝光发射光谱的影响,给出了纳米ZnO薄膜光致发光谱(PL)的积分强度和峰值强度与氧氩比关系。探讨了纳米ZnO薄膜的蓝光光谱的发射机制,初步证实了ZnO蓝光发射(2.88~2.69 eV)来自氧空位(VO)形成的浅施主能级上的电子至价带顶的跃迁。更多还原

【Abstract】 Nanocrystalline ZnO films were deposited on quartz substrates by radio-frequency magnetron sputtering(RFMS) method.The authors discussed the effect caused by the change in the ratio of oxygen to argon and quartz substrates temperature on the qualities of thin films and blue photoluminescence spectrum of ZnO films.Relationship between XRD intensity and FWHM of nanocrystalline ZnO films at different ratio of O2/Ar in processing was given.Photoluminescence spectrum(PL),absorption spectra(ABS),photoluminescence excitation spectrum(PLE) and X-ray diffraction pattern(XRD) of nanocrystalline ZnO film with excitation wavelength 300 nm were measured at room temperature.XRD pattern indicates that nanocrystalline ZnO film has a hexagonal wurtzite structure and is polycrystalline.Blue visible emission bands(430-460 nm) were observed,and its central wavelength is 445 nm.The relationship between PL area of integration and PL intensity of maximum of nanocrystalline ZnO films at different ratio of O2/Ar in processing was given.The luminescence emission peak located at 450 nm corresponds to the transition from the shallow level of oxygen vacancy to valence band or the interstitial.更多还原