【摘要】 采用中频磁控溅射及多弧离子镀相结合的复合镀膜工艺,在硬质合金YT14基体上制备了MoS2/Zr复合薄膜.采用扫描电子显微镜(SEM)考察了复合薄膜表面及截面的形貌,利用能谱分析(EDX)薄膜的成分组成.研究了沉积温度、基体负偏压及Zr电流等沉积工艺参数对复合薄膜的结合力、显微硬度、厚度等性能的影响.结果表明:沉积工艺参数对MoS2/Zr复合薄膜的性能影响很大,合理选择沉积工艺参数能够明显提高和改善复合薄膜的性能,并分析了沉积参数对性能的影响机理.在本实验条件下,最佳沉积工艺参数为:沉积温度200℃,基体偏压180 V,Zr电流30 A,制备的MoS2/Zr复合薄膜结构致密,其结合力约为60 N,厚度约为2.4μm,显微硬度约为HV900.更多还原

【Abstract】 The complex deposited process which fitted medium-frequency magnetron sputtering together with multi-arc ion plating,was utilized to prepare the MoS2 /Zr composite coating on the surface of cemented carbides YT14.SEM was adopted to observe and analyze the surface and cross-section morphologies of composite film.EDX was used to analyze the surface and cross-section component of the composite film.The influence of deposited process parameters,such as depositing temperature,negative bias voltage,Zr current,on the composite coating properties,including adhesion strength,micro-hardness and thickness were analyzed.The results show that proper processing parameter values could significantly improve the properties of composite coating.The effect mechanism of depositing parameter on coating properties were also put forward.The optimal parameter values with excellent properties of coatings were presented under this experiment conditions: depositing temperature is 180 ℃,negative bias voltage is 180 V,and Zr current is 30 A.The composite film is dense,the adhesion strength is about 60 N,the thickness is about 2.4 μm,and the micro-hardness is about HV900.更多还原