【摘要】 用理论公式与蒙特卡罗方法分别计算了动态流量校准系统和超高/极高真空校准系统中小孔流导的修正系数,比较了2种方法的计算结果。用蒙特卡罗方法计算了小孔系统的传输几率。蒙特卡罗方法计算结果的标准偏差在4.5×10^-7到1.1×10^-5之间。更多还原

【Abstract】 In this paper,different methods,based both on analytical consideration and on the Monte Carlo evaluation were applied to the calculation of the correction factor of the conductance of the orifice of the continuous gas expansion calibration system and XHV/UHV calibration system.The transmission probability is calculated.The standard uncertainty of the results calculated by Monte Carlo method are between 4.5×10^-7 and1.×10^-5.更多还原