【摘要】 氮化铝薄膜取向性直接影响到薄膜的压电特性和声波速度,是薄膜体声波谐振器/滤波器工艺过程中最重要的环节之一。对AlN薄膜材料的反应磁控溅射沉积工艺进行了研究,通过对AlN薄膜的取向性分析及其与工艺条件的比较,优化了取向性AlN薄膜的生长工艺条件,制备出了高取向和高致密的AlN薄膜。更多还原

【Abstract】 Orientation of AlN thin film is very important to its piezoelectric characteristic and acoustic wave velocity,it is one of the most important key factors in film bulk acoustic wave resonator/filter fabrication.This work investigates reactive magnetron sputtering deposition of AlN thin film,by comparing orientation of deposited AlN thin films under different deposition conditions,the fabrication recipe is refined,and a condensed high orientation AlN film is made.更多还原