【摘要】 简要介绍了硅微电子工业的发展状态、限制及对策。为了保持硅微电子工业的继续发展,主要的对策是利用新的结构材料以及新的器件结构和器件原理。在此基础上,介绍了新形势下硅微电子器件及电路辐射加固的考虑。更多还原

【Abstract】 Limitations to development of Si microelectronics industry and countermeasures against them were discussed.For sustainable development of the industry,application of new structural materials and novel device structures and principles are necessary.In addition,considerations on radiation hardening of Si microelectronic devices and circuits under the new situation were presented.更多还原