【摘要】 卢瑟福背散射技术是分析固体表面层元素成分、杂质含量和浓度分布分析,以及薄膜厚度、界面特性分析不可缺少的手段,具有灵敏度高、分析时间短、对样品的损伤较小、分析方法简便可靠等优点,在研究领域有着广泛的应用。从卢瑟福背散射技术分析原理入手,利用入射离子与靶原子核之间的大角度库仑散射现象,通过对散射离子能量、产额等物理量的测量,确定离子交换KTiOPO4波导中Rb原子的深度等参数分布。更多还原

【Abstract】 RBS is the indispensability means of analyze elements component of the surface layer of solid,impurity concentration and distribution of content,as well as film thickness,interface specialty analysis.The method has the advantages of high sensitivity,short analysis times,low damage to the sample and simple and reliable analyses etc.In the field of research it has wide application.Focusing on starting with Rutherford Backscattering technology analysis theory,using the wide-angle Coulomb scattering between projectile ion and target nuclei,through the measurements of scattering ion energy,yield and other physical to determine impurity atoms depth distribution and other parameters in the target.Thus we can have more comprehensive understanding of the target impurity species,the distribution and so on.更多还原