【摘要】 原子力显微镜(AFM)已经广泛应用于纳米科技领域。为获得准确的测量结果,对AFM非线性进行测量和校正是非常必要的。AFM非线性的测量方法有电容测微仪法、激光干涉法和扫描图像相关分析法等,其中图像相关分析法具有原位和简单等优点。本文应用图像相关方法,对不同漂移速率和扫描面积情况下的非线性测量结果进行实验对比分析。结果表明,漂移速率和扫描面积是影响图像相关法测量AFM非线性准确性的重要因素。更多还原

【Abstract】 Atomic force microscopy(AFM)is a powerful and versatile tool on nano scale. It is essential to characterizing the nonlinearity of AFM in order to acquire accurate images. One method to characterizing the nonlinearity is an approach by using the digital image correlation. In this paper,the factors of drift and scanning size will be discussed. Experiments and analysis show drift and scanning size will affect the characterizing nonlinearity of AFM.更多还原