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InP/InGaAs heterojunction bipolar transistors with different μ-bridge structures

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【作者】 于进勇刘新宇夏洋

【Author】 Yu Jinyong,Liu Xinyu,and Xia Yang (Microelectronic Devices and Integration Technology Key Laboratory of Chinese Academy of Sciences,Institute of Microelectronics, Chinese Academy of Sciences,Beijing 100029,China)

【机构】 Microelectronic Devices and Integration Technology Key Laboratory of Chinese Academy of Sciences,Institute of Microelectronics,Chinese Academy of Sciences

【摘要】 Several μ-bridge structures for InP-based heterojunction bipolar transistors (HBTs) are reported.The radio frequency measurement results of these InP HBTs are compared with each other.The comparison shows that μ-bridge structures reduce the parasites and double μ-bridge structures have a better effect.Due to the utilization of the double μ-bridges,both the cutoff frequency fT and also the maximum oscillation frequency fmax of the 2×12.5 μm2 InP/InGaAs HBT reach nearly 160 GHz.The results also show that theμ-bridge has a better effect in increasing the high frequency performance of a narrow emitter InP HBT.

【Abstract】 Several μ-bridge structures for InP-based heterojunction bipolar transistors (HBTs) are reported.The radio frequency measurement results of these InP HBTs are compared with each other.The comparison shows that μ-bridge structures reduce the parasites and double μ-bridge structures have a better effect.Due to the utilization of the double μ-bridges,both the cutoff frequency fT and also the maximum oscillation frequency fmax of the 2×12.5 μm2 InP/InGaAs HBT reach nearly 160 GHz.The results also show that theμ-bridge has a better effect in increasing the high frequency performance of a narrow emitter InP HBT.

【关键词】 InPHBTμ-bridge
【Key words】 InPHBTμ-bridge
【基金】 Project supported by the National Natural Science Foundation of China(No.60676046)
  • 【文献出处】 半导体学报 ,Journal of Semiconductors , 编辑部邮箱 ,2009年11期
  • 【分类号】TN322.8
  • 【被引频次】2
  • 【下载频次】41
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