【摘要】 通过在聚合物衬底上制备热敏薄膜可以实现非平、屈曲物体表面温度的实时监控和测量。利用脉冲激光沉积技术在聚酰亚胺衬底上低温(250℃左右)制备了超薄铂热敏薄膜,其室温下的电阻温度系数为1.01×10-3/K。通过增加ZnO过渡层,可使铂薄膜的电阻温度系数增大为1.55×10-3/K。更多还原

【Abstract】 The temperature of accidented and curved surface can be real-time supervised and tested by preparing heat-sensitive thin film on polymer substrate.Ultra-thin Pt heat-sensitive film was prepared with pulsed laser deposition on polyimide substrate at lower temperature(～250 ℃).The resistance-temperature coefficient of the Pt thin film is 1.01×10-3 /K.The resistance-temperature coefficient of the Pt thin film increases to 1.55×10-3 /K by preparing ZnO thin film before preparing Pt thin film with pulsed laser deposition on polyimide substrate.更多还原