【摘要】 针对用电容式射频微机械谐振器芯片级测试时信号微小、寄生效应严重、从而使得激励和检测困难的问题,本文对基于固支梁的微机械谐振器的电学测试理论和技术进行了研究.利用机电类比的方法得到了包含寄生参数的谐振器的等效电路并利用安捷伦的ADS电路仿真软件进行模拟.根据电路仿真结果分析了谐振器寄生参数对测试结果的影响,并在此基础上搭建了经过良好电磁屏蔽设计的谐振器单端口电学测试平台.使用合适的偏置,对谐振器进行了芯片级测试,得到了一个8.6 MHz谐振器的幅度——频率响应特性曲线,其结果与设计值相符.更多还原

【Abstract】 The measurement technique and theory of micromechanical resonators assisted by clamped-clamped beam were studied,mainly focusing on problems of signal actuating and detecting brought by feebleness of signal and terrible parasitic effects in the chip level electrical measurement of capacitive RF micro-resonators.Mechanical equivalent circuits of micromechanical resonators with parasitic parameters were defined with method of mechanical-to-electrical analogy and employed for simulation by using Agilent ADS software.The effects of the parasitic parameters were evaluated,based on which,a well shield one-port measurement setup was developed on probe station for the chip level test. With proper bias,resonators were measured on chip level and the amplitude-frequency characteristic curve of an 8.6 MHz resonator was gained,which corresponded well to the design.更多还原