【摘要】 设计了一种用于刺激视网膜的生物微电极阵列,采用非硅MEMS技术,在聚酰亚胺柔性衬底上制备出了具有一定生物相容性的,电极数为20的生物刺激电极阵列,并成功实现了器件从基底的完整释放。实验中采用了二次曝光法,用金修饰了电极柱侧壁,从而提高了电极的生物相容性;采用PDMS作为柔性衬底与玻璃片的粘附层,使得器件的释放过程,简单且无毒无害,对器件也无损害。制造出的器件尺寸小,质量轻,可靠性高,机械柔性好。对微电极阵列进行了电学性能测试,在10~5000Hz频率范围,其阻抗为104~106欧姆,符合电刺激要求。更多还原

【Abstract】 The feasibility of an implantable retinal prosthesis that would partially restore vision by direct electrical stimulation of retinal neurons has been proved by studies.We have fabricated the stimulating bio-electrode array on the flexible substrate by micro electro mechanical system(MEMS)techniques.The stimulating electrodes are 100 μm in diameter,packaged by polyimide which is a good water barrier.The impedance of single electrode is 104 to 106 Ohm in the range of frequencies from 10 to 5 000 Hz.更多还原