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Mn掺杂GaN基稀磁半导体材料制备和特性研究
Study on the Fabrication and Properties of GaN-Based Diluted Magnetic Semiconductors
【摘要】 利用金属有机物化学气相沉积法在蓝宝石衬底上生长了Mn掺杂GaN基稀磁半导体材料。原子力显微镜研究表明,少量的Mn在样品表面起到活性作用。X射线衍射和喇曼散射研究表明,当Mn的掺杂浓度很低(<2.7%)时并没有观察到第二相的出现,当Mn的掺杂浓度达到3.9%时观察到了第二相。采用光学测试得到了由于Mn杂质引入杂质能级和缺陷而产生一个很宽的发射和吸收谱。
【Abstract】 The Ga1-xMnxN DMS materials were grown on c-sapphire substrates by metalorganic chemical vapor deposition.Surface structure was characterized by atomic force microscopy and Mn as a surfactant was detected.Crystalline quality was measured by X-ray diffraction and Raman scattering.None of second phases were detected for these samples at low(<2.7%)Mn concentrations,but the second phases were observed when the Mn doping concentration was 3.9%.An emission band and an absorption band were detected by optical measurements methods.They are both attributed to some Mn-related levels.
【Key words】 MOCVD; diluted magnetic semiconductors; Mn-doped; XRD;
- 【文献出处】 半导体技术 ,Semiconductor Technology , 编辑部邮箱 ,2008年S1期
- 【分类号】TN304.055
- 【被引频次】2
- 【下载频次】175