【摘要】 为了测试微观条件下材料表面的摩擦学性能,给出了一种微摩擦力的光学测试方法。基于MEMS工艺制作了硅微力传感器,通过标定的方法得到了微力与传感器的变形量之间的关系,采用光反射的方法测量了试验过程中传感器的变形量,进而通过数据处理得到微摩擦力。简要介绍了微摩擦力的光学测试原理,给出了硅微力传感器的结构及制作过程,并对铜和铝的表面进行了微摩擦力测量。初步试验结果表明,该方法具有测试精度高、重复性好、系统性能稳定的优点,能满足微机电系统中摩擦力测试的需要。更多还原

【Abstract】 An optical testing method of micro-friction and its principle was introduced to characterize the friction properties of material surface under microcosmic conditions.The micro-force sensor of Si slice was firstly fabricated by MEMS technique,and then the relationship between micro-force and deformation of sensor was obtained by demarcation and the deformation of sensor was tested by light reflecting in the process of experiments.Finally,the micro-friction force was obtained by the data process.Simultaneously the manufacture process and the structure of sensor were illustrated.After the micro-friction on the surfaces of Cu and Al were measured,the results shows that the method has high precision, good repetition and stability,and it can meet the demands of micro-friction testing in MEMS.更多还原