【摘要】 与常规检波器不同,MEMS电容式加速度传感器所获得的是地震信号变化引起的电容的变化量。为了将这个电容的变化量转换为电压信号输出,而且使该传感器能有效接收到深层反射回来的微弱信号,我们设计了一种电容式传感器的调理电路。本文对组成该调理电路的接口电路、放大电路、低通滤波电路进行了详细地分析,并对调理电路的性能进行了实际检测。更多还原

【Abstract】 Different from normal geophone,what acquired by MEMS capacitance accelerometer is the change of capacitance caused by change of seismic signal.In order to transform the change of capacitance to signal voltage output,and to effectively receive the faint signal reflected from deep interfaces,we design the signal conditioning circuit of a capacitive sensor.This paper analyzes in detail the interface circuit,amplifying circuit and lowpass filter circuit composing the conditioning circuit,and carries out the practical detection for the performance of the conditioning circuit.更多还原