【摘要】 本文以单晶硅为基体,Ar等离子体对基体进行清洗,用法制备类金刚石(DLC)膜和掺氮的DLC膜。沉积DLC膜所用的气体是乙炔和氩气,沉积掺氮的DLC膜用乙炔和氮气。利用衰减全反射红外光谱(ATR-FTIR)和扫描电子显徽镜(SEM)对沉积的DLC膜和掺氮的DLC膜进行结构分析和观察表面形貌。考察了乙炔比例、放电功率等沉积参数对DLC膜的影响。通过接触角和血小板黏附实验,进行了DLC膜的抗凝血性能分析,效果较好。更多还原

【Abstract】 In this paper,the property of Diamond-like Carbon (DLC)films and the advances in the research were reviewed.The DLC films were prepared with Ar and C2H2,and the DLC films with nitrogen were prepared with C2H2 and N2 by PECVD on the surface of silicon which was rinsed by Ar plasma.The structure and surface topography of the DLC films was investigated by ATR-FTIR and SEM.Effect of power and proportion of gases for the DLG films were studied.The anticoagulative property of DLC films was studied by the contact angle and the platelet adhesion experiment.The result showed that the DLC films and the DLC films with nitrogen can be effectively prepared with C2H2 by PECVD.更多还原