【摘要】 介绍了单片集成硅光接收器的研究背景,阐述了硅光电探测器的工作机理。设计了一种应用于单片集成硅光接收器的PIN结构光电探测器,并用Silvaco软件对光电探测器的器件结构、光谱响应、响应电流及其随入射光功率的变化、器件的暗电流分别进行了模拟,对模拟结果进行了分析。设计了该光电探测器的版图,给出了其主要工艺流程,搭建了其光响应谱测试电路。最后对研究结果进行了总结。更多还原

【Abstract】 The developing background of the monolithic integrated Si photo-receiver was presented.The mechanism of the Si photo-detector was discussed.A PIN photo-detector used in the monolithic integrated Si photo-receiver was designed.The structure,spectral response,response current,metabolic current depend on changed intensity and dark current of the photo-detector were simulated,the simulated results were analyzed.Layout design was accomplished,the process was presented and the spectral response testing circuits were set up.At last,all the results were summarized.更多还原