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X-Factor理论在半导体晶圆制造中的应用
Application of X-Factor Theory in the Semiconductor Wafer Fabrication
【摘要】 目前快速响应市场和降低成本成为半导体企业重点强调的目标,这就需要较短的生产周期和最大限度地使用最少的设备。但实际中,生产周期和设备利用率存在着此消彼长的关系。介绍了一种X-factor理论,其具有综合考虑这两者关系的优点,目前该理论在国际半导体企业中已经得到运用。就此方法与传统的监测和优化设备瓶颈方法进行比较,得出了此方法的合理性和优越性。
【Abstract】 Recently on time to market and low cost are the strong emphasises in the semiconductor industry,which require short cycle time and high utilization of a minimum number of tools.But a trade off is between cycle time and utilization,how to solve the issue better becomes a big problem in semiconductor factory.X-factor theory for solving the problem was introduced,it is used in semiconductor factory gradually now.Comparing this new method with traditional machine bottleneck inspection and optimization methods,it shows that X-factor theory method is more proper and better.
- 【文献出处】 半导体技术 ,Semiconductor Technology , 编辑部邮箱 ,2007年08期
- 【分类号】TN305
- 【被引频次】3
- 【下载频次】117