【摘要】 介绍宽束射频离子源原理及结构,分析射频匹配网络中调谐和负载电容与输入频率、离子源电阻、传输线特征阻抗、支路电感的关系,导出了射频离子源阻抗公式。更多还原

【Abstract】 Introduces the formation principle and construction of board-beam RF ion source.Discusses the relationships of tuning and load capicitance to frequency input,resistance of ion source,characteristic impedance of power lines and branch inductance in the network that matches the ion source.A formula of equivalent impedance of RF ion soure is therefore derived.更多还原