【摘要】 本文利用高真空离子束辅助沉积系统(IBAD)在室温下制备具有纳米尺寸的ZrN/W多层膜,通过改变双靶的沉积时间,合成一系列的具有不同调制周期(3 nm~10 nm)的纳米多层膜。利用AES,XRD和纳米力学测试系统,表面形貌仪表征了薄膜的成分、结构和机械性能,分析了不同调制周期对薄膜结构与机械性能的影响。结果表明:多层膜的机械性能普遍优于两种个体材料的混合相;在调制周期为8.6 nm时,显示出强的ZrN(111),W(110)织构和较弱的ZrN(220)峰,与其他条件下制备的样品比较,它具有较高的硬度(~26 GPa),较高的弹性模量(~310 GPa)和较强的膜基结合力(~80 mN)。低角度XRD分析证明了薄膜的多层结构。更多还原

【Abstract】 ZrN/W multilayers with different nanoscale modulation periods(3 nm～10 nm) have been synthesized for different deposition time by ultra-high vacuum ion beam assisted deposition(IBAD) at room temperature.The microstructures and mechanical properties of the multilayers were characterized with X-ray diffraction(XRD) and Auger electron spectroscopy(AES).The results show that the mechanical properties of all the multilayers are better than that of the monolithic ZrN and W coatings grown by conventional technique.For instance,its hardness,elastic modulus and fracture resistance are up to 26 GPa,310 GPa and 80 mN,respectively.At a modulation period of 8.6 nm,strong peaks of ZrN(111) and W(110) textures and a weak peak of ZrN(220) textures can be observed in the XRD spectra.更多还原