【摘要】 微尺度下,压膜阻尼对微机电系统(MEMS)微结构功能特性有很大影响。从滑流效应、挤压效应和穿孔效应三个方面对平板间气膜阻尼进行理论分析,运用可压缩气膜的雷诺方程对由垂直运动产生压膜阻尼进行模型分析,详细介绍了线性Reynolds方程的多种近似解,建立了热流方程模拟的有限元分析模型,分别针对滑流、挤压和穿孔对气膜阻尼的影响进行了有限元模拟仿真及讨论,并与近似的理论结果进行对比,结果表明:滑流效应对压膜特性影响较大;增大孔径可以减小气膜阻尼和刚度系数,减小压膜阻尼对MEMS微结构的影响。更多还原

【Abstract】 In micro-scale,squeezed film damping has important effects on performances of structures in Micro-electro-mechanical systems(MEMS).The effects of slip,squeeze and perforation on the squeezed film damping between plates are ayalyzed theoretically.The model of the squeezed film damping is presented using Reynolds equation for compressible gas film and the linearized solutions of the equation are introduced in detail.Heat transfer analogy has been applied to calculate the effective damping and stiffness coefficient of the squeezed film and discuss the effects of slip and perforated holes on the squeezed film for some conditions.Simulation results are compared with the theoretical solutions referred to references.It is indicated that the slip effect affects the characteristics of squeezed film;the squeezed film damping and stiffness coefficients decrease with the increase in the radius of the perforated holes.更多还原