【摘要】 探讨了微反应器制作技术的创新与优化,分析了微反应器的基本结构与常用材料,总结了它的三种主要加工技术,即硅体微加工、超精密加工与LIGA工艺,以及四种常用的连接方法,即键合技术、高能束焊接、扩散焊与粘接,指出了在选材、加工、连接等方面应注意的问题,并给出了相应的实例,其中包括一台利用铁-铬-铝不锈钢片制作的甲醇重整制氢微反应器,它采用放电加工和湿法刻蚀技术,用扩散焊实现了连接密封,经100 h的连续试验表明,该微反应器可以与10 W的燃料电池配套使用。最后指出了目前在该领域存在的主要问题。更多还原

【Abstract】 Innovation and optimization of fabrication technology for microreactors are discussed,and the basic structures and materials in common used for the microreactors are introduced.Three kinds of primary machining technologies are summarized, which include silicon bulk micromachining,ultra-precise machining and LIGA technology,and four types of prevailing connection methods,such as bonding,high energy beam welding,diffusion welding and adhesive joining are also discussed.Selection of materials,machining technologies and connection methods are demonstrated by introducing the fabrication of some typical microreactors,especially a micro-channel reactor for the production of hydrogen concerning steam reforming of methanol.The performance of the micro-channel reactor,which is made of Fe-Cr-Al stainless steel lamination by MEDM,wet etching and diffusion bonding,has been investigated in a continuous reaction for 100 h.The results show that it can generate enough hydrogen for power output of 10 W.Major problems of the microreactor’s fabrication are also pointed out.更多还原