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一种PDMS微混合器的制备及性能分析

Fabrication and Performance Analyses of PDMS Micromixer

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【作者】 李淑娴吴一辉贾宏光张平王淑荣宣明

【Author】 LI Shu-xian~(1,2),WU Yi-hui~1,JIA Hong-guang~1,ZHANG Ping~1,WANG Shu-rong~1,XUAN Ming~1(1.National Key Lab of Applied Optics,Changchun Institute of OpticsFine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;2.Graduate School of the Chinese Academy of Sciences,Beijing 100039,China)

【机构】 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室 长春130033中国科学院研究生院北京100039长春130033

【摘要】 介绍了一种用于微生化分析仪的PDMS(polydimethylsiloxane,聚二甲基硅氧烷)微混合器的模压制备,由于其兼有混合器与比色皿的功能,因此,对其透光及混合性能进行了分析。经实验证明,制品中经常出现的变形、气泡、条纹等缺陷均会使混合器的透射比变差,且缺陷越多光学性能越差。而所制作的PDMS混合器透光面的光学性能优秀,在340 nm的透射比达到90%,能够满足微生化分析仪的紫外、可见光检测要求。对膜厚为50μm的φ6 mm PDMS混合器进行定量检测发现,当驱动电压为3 V,驱动频率为80 Hz时,在5 s内能达到很好的混合效果。

【Abstract】 The fabrication and performance analyses of PDMS(polydimethylsiloxane) micromixers in mini biochemical analyzer were introduced.The PDMS micromixer was fabricated by mold pressing.The performance of transmission and mix were investigated based on the application of micromixer.The results show that distortions,air bubbles,stripes and so on can destroy the transmission of the mixer.The more the defects are,the lower the transmission is.After being removed those defects,the PDMS mixer has fine optical performances,and especially the transmission could reach to 90% when the wave length is 340 nm.The PDMS mixer can satisfy the biochemical analyzer in ultraviolet,visible range.After mixing experiments,the active mixing could be achieved in 5 s for φ6 mm mixer whose membrane thickness is 50 μm,and driven voltage and frequency are 3 V and 80 Hz,respectively.

【关键词】 微混合器PDMS模压透射比混合
【Key words】 mixerpolymethylsiloxanemold pressingtransmissionmixing experiment
【基金】 国家863MEMS重大专项资助(2003AA-3-A19;2004AA404250);中国科学院二期创新“微型生化分析系统关键技术研究”资助项目
  • 【文献出处】 微细加工技术 ,Microfabrication Technology , 编辑部邮箱 ,2006年02期
  • 【分类号】TN492
  • 【被引频次】4
  • 【下载频次】183
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