【摘要】 介绍了一套新型的纳米三维刻划加工控制系统,系统基于AFM原子力显微镜,配合三维微动工作台,设计开发了专门的加工控制装置,成功的实现了纳米刻划加工中的深度控制问题,可实现在X、Y、Z方向分别为100μm×100μm×20μm范围内,X、Y向精度为±5 nm、Z向精度为±10 nm的三维结构机械刻划加工,应用结果表明,该系统实现了具有在位形貌检测功能的三维纳米刻划加工,在微纳米刻划加工领域具有一定的实用性和推广价值。更多还原

【Abstract】 An innovational control system of three-dimensional nanoscratching facility is presented.The system is built upon the commercialized AFM and the three-dimensional micro displacement moving stage.Special machining control system has been developed,which is characterized by the cutting depth control during the nanoscratching process.The three-dimensional nanostructure scratching can be realized in the scale of 100μm×100μm×20μm,and the dimensional accuracy of the orientation X,Y and Z are ±5nm,±5nm and ±10nm respectively.Experimental results show that both the three-dimensional nanoscratching function and its intrinsical on-line micro topology measurement function can work correctly on this enhanced platform.更多还原