【摘要】 采用蒙特卡罗模型对氮空心阴极放电等离子体鞘层离子(N2+、N+)的输运过程进行了模拟研究,计算了阴极鞘层中氮离子(N2+、N+)的能量及角分布的空间变化和粒子密度及平均能量随放电参数的变化规律。研究结果表明:空心阴极放电产生的氮离子,在鞘层输运过程中,N2+是密度几乎不变的低能粒子;N+是密度逐渐减少的高能粒子。随着电压增加,N+密度减小,平均能量增加;N2+密度和平均能量变化不明显。能量及入射角的相对分布规律与平板电极氮直流辉光放电基本类似,但圆筒空心阴极放电更有利于氮离子的产生。更多还原

【Abstract】 The ions(N2+,N+) transport process in cathode sheath of nitrogen cylinder hollow cathode discharge plasma is studied using Monte Carlo simulation.Energy distribution and angular distribution of ions(N2+,N+) in cathode sheath are calculated,and their variation behaviors with the discharge parameters are investigated.Results are compared with ones of the parallel flat electrode N2 dc glow discharge under the corresponding conditions.It is shown that the nitrogen cylinder hollow cathode discharge will be beneficial to the production of the nitrogen ions.更多还原