【摘要】 介绍了静电探针在22cm双潘宁离子源中心等离子体参数测量中的应用。测出了探针的伏安特性曲线,由该曲线求出在弧流为200 A时,电子温度约为6.0 eV,密度约为2×1012cm-3,这对于调整放电控制条件,获得高效率大功率的离子源有重要的参考价值,并且对于今后实现强而且均匀的中性束束流的引出也有着重要意义。更多还原

【Abstract】 In this paper,measurement of plasma parameters at the center of 22 cm duoPIGatron ion source with electrostatic probe is briefly introduced.The probe characteristic curve was measured,from which we know that when arc current is 200 A,the electron temperature is about 6.0 eV,the electron density is about 2×10¹² cm^-3.This is of valuable meaning to obtain ion source parameters of high efficiency and power through adjusting discharge control conditions,and it is useful to obtain powerful and uniform beam in the future.更多还原