【摘要】 选择锆和钨的氮化物作为个体层材料,利用超高真空射频磁控溅射系统制备ZrN、WN及一系列的ZrN/WN多层薄膜。通过XRD,SEM和纳米力学测试系统分析了该体系合成中调制周期与ZrN、WN单层厚度比例(tZrN/tWN)对多层膜结构与机械性能的影响。结果表明:大部分多层膜的纳米硬度与弹性模量值都高于两种个体材料硬度的平均值;当调制周期Λ=30nm,tZrN∶tWN=2∶3时,结晶出现多元化,多层膜体系的硬度、应力以及弹性模量均达到最佳效果。多层膜的机械性能改善明显与其多层结构和多晶结构有直接的联系。更多还原

【Abstract】 This paper reported the deposition of ZrN/WN multilayered coatings with nanoscale bilayer period using ultra-high vacuum radio freqency magnetron sputter chamber.XRD,SEM,Nano indenter and profiler were employed to investigate the influences of modulation periods and ZrN∶WN thickness ratio on microstructure,mechanical properties of the coatings.The results show that all multilayered coatings possess higher nanohardness and elastic modulus than the rule-of-mixtures value of monolithic ZrN and WN coatings.At Λ=30nm,t_ZrN∶t_WN=2∶3,XRD pattern showed that ZrN/WN multilayered coatings obtained mixed polycrystalline texture.The multilayered coating at this condition possessed higher hardness,elastic modulus,and lower internal stress,compared to those synthesized at other Λ and ZrN∶WN thickness ratio.更多还原