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基体温度对诱增透滤光片特性的影响
The Effect of Structuring Temperature to Performance of Filter of Exutory Transmission
【摘要】 考察了λ=(620±10)nm栅滤光片的制备过程,分析了工艺参数对滤光片性能的影响.结果表明,除了蒸发速率、银层厚度、监控波长等工艺措施外,合适的基体温度是获得优良性能诱增透滤光片的重要因素.
【Abstract】 Mirrored finalization of cascade filter of λ=(620±10)nm is expedited;the technological parameter which works on performance of filter is analysed.It thinks out right structuring temperature is important factor which obtains fine performance of filter of exutory transmission except for evaporating rate,thickness of Ag and controlling wavelength and so on.
【关键词】 基体温度;
诱增透滤光片;
特性;
【Key words】 structuring temperature; filter of exutory transmission; performance;
【Key words】 structuring temperature; filter of exutory transmission; performance;
【基金】 福建省教育厅基金资助项目(03BD439)
- 【文献出处】 福建师范大学学报(自然科学版) ,Journal of Fujian Normal University(Natural Science Edition) , 编辑部邮箱 ,2006年01期
- 【分类号】TH773
- 【被引频次】1
- 【下载频次】48