【摘要】 微悬臂梁是一种结构简单、易于进行微加工以及大量生产的传感器结构。当分子吸附在微悬臂梁表面之后,微悬臂来的弯曲以及振荡频率都会发生变化,这使微悬臂梁在化学和生物的实时探测方面非常具有吸引力。采用光学方法探测微悬臂梁的偏转;比较了不同的悬臂梁结构在流体中的稳定性以及不同结构的反光部分的反光效果,并将悬臂梁用于研究PNIPAM分子构象随温度的转变.更多还原

【Abstract】 Microcatilever is a kind of simple sensor configuration that is easily micromachined and mass produced. Adsorption of molecules on the surface of a cantilever would result in changes in microcatilever’s bending and resonance frequency, which make it especially attractive in real time chemical and biological detection. Microcantilever deflection was measured by optical method. Preliminary evaluation of these microfabricated cantilevers was performed by comparing the intensity of reflecting light on the end surfaces of different cantilever figures and the stability of different cantilever figures in liquid. Then, cantilevers will be used to detect the changes of PNIPAM molecules configuration with temperature.更多还原