【摘要】 针对如何使用具有集总性质的节点分析法仿真非集总的温度分布这一难点问题,本文以平面内运动的热执行器作为研究对象,依据不同坐标的空间温度分布之间相关性较强的特点,利用傅里叶变换使连续的空间温度分布问题集总化,建立了热执行器基本单元的温度分布节点分析法模型.所建立的模型节点数较少,结构清晰.同时为使之能够与控制电路及反馈电路协同仿真,本文还建立了热执行器基本单元的等效电路模型.为证实模型的有效性,本文使用该模型对三种常见的平面内运动热执行器加以分析,由ANSYS验证了其仿真结果的正确性.更多还原

【Abstract】 This paper develops a nodal analysis model of in-plane electrothermal microactuators with the Galerkin method based on the weighted residue method.With high accuracy,easy modeling,and clear configuration,the model makes it possible to co-simulate with the control circuit,which means it can simulate the whole system with the electrothermal microactuators.The model is verified by simulation with ANSYS and agrees well with it.更多还原