【摘要】 用数值和解析的方法研究了SiC隐埋沟道MOS结构夹断模式下C-V特性的畸变.隐埋沟道MOSFET中存在一个pn结,在沟道夹断以后,半导体表面耗尽区和pn结耗尽区连在一起,这时总的表面电容是半导体表面耗尽区电容和pn结电容的串联,使埋沟MOS结构的C-V特性发生畸变.文中通过求解泊松方程,用解析的方法分析了这种畸变发生的物理机理,并对栅电容进行了计算,计算结果与实验结果符合得很好.更多还原

【Abstract】 The distortion of the C-V characteristics of a SiC buried-channel MOS structure is presented.It is difficult to characterize the gate capacitance because there is a pn junction in buried-channel MOSFETs.The surface depletion region and n-side space-charge region merge when the channel is punched through.In this case,the total surface capacitance is the sum of the surface depletion region capacitance and the pn junction capacitance,and the C-V characteristics are distorted.The analytic expression of gate capacitance in the pinch-off mode is obtained by solving Poisson’s equation.The C-V characteristics in the pinch-off mode are analyzed on a fundamental physical level.The gate capacitance calculated with the model agrees well with experimental results.更多还原