【摘要】 使用三维电磁场模拟的方法对相同硅衬底结构下不同布图结构的螺旋电感进行了模拟和分析.通过改变电感匝数、电感金属的宽度和间隔以及电感的内径,模拟和分析了电感性能的变化.给出了引起电感性能变化的原因.结果表明优化电感的几何参数可以有效地改善电感性能.得出了一些实用的设计原则,可有效地指导射频集成电路中集成电感的设计.更多还原

【Abstract】 The effects of key geometrical parameters on the performance of integrated spiral inductors are investigated with the 3D electromagnetic simulator HFSS.While varying geometrical parameters such as the number of turns (N),the width of the metal traces (W),the spacing between the traces (S),and the inner diameter (ID),changes in the performance of the inductors are analyzed in detail.The reasons for these changes in performance are presented.Simulation results indicate that the performance of an integrated spiral inductor can be improved by optimizing its layout.Some design rules are summarized.更多还原