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化学气相传输法生长ZnO单晶
Growth of ZnO Single Crystal by Chemical Vapor Transport Method
【摘要】 利用化学气相传输法生长了ZnO单晶.通过控制源区和生长端的温度梯度,使用碳辅助增强质量传输效应,在无籽晶自发成核的条件下,得到了晶粒尺寸达5mm×8mm的ZnO晶体.利用长有GaN层的蓝宝石晶片作为籽晶,得到了直径32mm、厚4mm左右的ZnO单晶体.用光致发光谱和X射线双晶衍射研究了ZnO晶体的性质并对生长的热力学过程和现象进行了分析.
【Abstract】 A ZnO single crystal is grown by a chemical vapor transport method.The size of the self-nucleated grown ZnO single crystal is 5mm×8mm through the control of temperature gradient of source and growth zones and the assistance of mass transport enhancement effect of carbon in the growth process.By using a GaN buffered sapphire substrate,a ZnO single crystal of 32mm diameter,4mm thick is obtained.PL spectroscopy and X-ray diffraction technique are used to characterize the properties and the quality of the ZnO single crystal.Thermodynamic phenomena of the single crystal growth process are also discussed.
- 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,2006年02期
- 【分类号】TN304.05
- 【被引频次】20
- 【下载频次】487