【摘要】 针对MEMS开关在宽带应用时遇到的驱动信号与微波信号间的干扰问题,论述了驱动信号与微波信号物理隔离的多种开关的设计,分析了4种结构形式的MEMS开关,使用IntelliSuite○R软件进行开关机电耦合分析。在开关总的结构尺寸确定的前提下,使用ADS/Momentum场分析软件,微调膜桥和梁的结构参数,通过通孔接地实现微带线与CPWG信号的连接,通过驱动电极的结构和连接方式及与微波信号线间隙的调整,实现了MEMS开关整体性能的优化。更多还原

【Abstract】 Four kinds of MEMS switches were present, with bias electrodes physically insulated from RF/microwave transmission line,which were designed for lower crosstalk between bias and microwave signals. The mechanical structure of these switches was optimized by electromechanical coupling analysis of IntelliSuite(r) software. The RF/microwave performances of these switches were optimized by 2.5 dimensional electromagnetic(EM) field-solvers of ADS/Momentum. The optimized design consists of fine tuning structural parameters, vias grounds and adjusting designes of the bias electrodes.更多还原