【摘要】 光学玻璃的抛光是一个复杂的机械、化学、物理反应过程。其中,抛光粉的流变性对抛光的作用不可忽视。本文用NDJ-1型旋转粘度计测定了二氧化铈浆料的表观粘度,比较了浆料的浓度、粉体的温度、粒度和体系的酸度对浆料流变性的影响。更多还原

【Abstract】 Rheoloy property of polishing slurry plays an important role in the chemicomechanical polishing (CMP) of optical glass as well as other planning techniques. In this paper, the rheoloy property of ceria slurry was investigated by the determining of apparent viscosity of ceria slurry. The effects of particle size, solution acidity, system temperature and concentration of ceria on the rheoloy property of ceria slurry were examined.更多还原