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三维光成型基础固化工艺的仿真和实验研究

Study on Simulation and Experiment of Foundational Solidification Process for Stereo Photo Lithography

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【作者】 马德盛王翔赵钢黄文浩

【Author】 MA De-sheng, WANG Xiang, ZHAO Gang, HUANG Wen-hao (Department of Precision Machinery & Precision Instrument, University of Science Technology of China, Hefei 230026, China)

【机构】 中国科学技术大学精密机械与精密仪器系中国科学技术大学精密机械与精密仪器系 合肥230026合肥230026合肥230026

【摘要】 在紫外光对液态树脂进行固化成型过程中,扫描光斑的直径、光强和扫描速度等工艺参数对固化结果有着直接影响。首先结合高斯光束的固化理论分析,从平面固化成型基本要素的直线段、圆弧线段的线宽、线高及其精度入手,在理论上分别得到线宽、线高与工艺参数之间的正比关系和指数关系;其次,通过Matlab的建模计算,明确了光强度和扫描速度的变化对固化线宽和线高影响程度的相近性,其中,扫描速度大于600μm/s后,随着速度的增大其产生的误差也越大,并通过实验研究验证了理论分析和建模方法的正确性。最后,通过仿真和实验对工艺参数以及扫描方式的优化,有效地解决了平面轮廓固化扫描中转向拐点处重复曝光引起的固化精度问题。

【Abstract】 In the process of solidification by UV laser to liquid photopolymer, the technical parameters including the diameter of spot, exposure intensity and the scan speed have a direct effect on the solidifiedform This paper begins with the theoretical analysis of the Gaussian beam that focuses on the width, height and the precision of the elementary planar solidifiedforms, such as lines and arcsIt educes the nonlinear positive correlation relationship and the exponential relationship respectively, which cover the width, height of the line and the processing parameters Through the computed modeling by MATLAB, the closely effects of exposure intensity and scanning speed on precision of solidified form are obtained The errors of solidified form rise along with the speed increasing especially when the scan speed exceed 600 _m/s, which is greatly approximated to the experiment results.Eventually, the approved solidified-forms and precision of the broken line’s corners is achieved by optimizing the process parameters and scan methods.

【基金】 国家自然科学基金资助项目(50275140)
  • 【文献出处】 微细加工技术 ,Microfabrication Technology , 编辑部邮箱 ,2005年02期
  • 【分类号】TQ320.6
  • 【下载频次】114
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