【摘要】 介绍了化学气相沉积法制备难熔金属钼膜层的原理和方法。以MoF6 和H2 为原料,采用化学气相沉积法在纯铜基体上沉积出难熔金属钼膜层。分析研究了沉积层的组织、结构和硬度。实验结果表明:沉积膜层显微组织随沉积温度变化而不同,沉积温度较低时沉积层显微组织为细晶层状结构,沉积层硬度可达6 77HV ;沉积温度较高时沉积层显微组织为致密的柱状晶,硬度稍高于一般烧结钼。更多还原

【Abstract】 This paper presents the principle and method of chemical vapor depositing molybdenum. Molybdenum coating is deposited on copper substrates from the mixture of MoF₆ and H₂. The microstructures and microhardness of the deposits are analyzed.The results show that the microstructures change with the variation of deposition temperature. The microstructures of deposited layer present a fine grains multilayered structure with a microhardness as high as 677HV at relatively low deposition temperatures, while a compact columnar crystals microstructure is obtained at higher deposition temperatures.更多还原