【摘要】 研究了水热处理对于SnO2厚膜气敏传感器性能的影响。为了便于作对比,首先把SnO2纳米粉(平均粒径约200nm)平均分为两份:一份不经处理,直接用传统的厚膜传感器制备工艺制成气敏传感器(称为“原粉传感器”);另一份经过200℃水热处理后,用同样的工艺制备成厚膜气敏传感器(称为“预处理粉传感器”)。利用乙醇、丙酮、CH4、H2和CO气体对这两种气敏传感器的性能进行了测试,结果表明预处理粉传感器的灵敏度和选择性明显优于原粉传感器。为了分析出现这种差异的原因,我们对这两种传感器的显微结构进行了分析,并在此基础上对实验现象进行了讨论。更多还原

【Abstract】 In this paper,the effect of hydrothermal treatment on the gas sensing properties of SnO₂ thick-film gas sensors was studied.For comparison,SnO₂ nanoparticles（with average particle size of 200nm） were divided into two aliquots: one aliquot was used as the material for the fabrication of thick-film gas sensors（denoted as "raw sensors"）.The other aliquot was hydrothermally treated at 200℃,and then it was also used for fabricating the gas sensors（denoted as "pre-treated sensors"）.The testing results of these two kinds of gas sensors to ethanol,acetone,CH₄,H₂ and CO gases indicated that both sensitivity and selectivity of the pre-treated sensors were obviously higher than those of the raw sensors.The difference in gas sensing properties between the two kinds of sensors was analyzed on the basis of TEM measurement.更多还原