【摘要】 分析了多晶硅微悬臂梁断裂失效机理,利用威布尔分布理论建立了多晶硅微悬臂梁在轴向拉抻和垂直两种受力方式下的断裂可靠性预测模型,模型考虑了由于实际加工工艺所带来的残余应力因素,模型所得的预测曲线与实验数据比较吻合。更多还原

【Abstract】 The mechanism of fracture failure was analyzed to the polysilicon micro-cantilever. A fracture feliability prediction model based on Weilbull distribution was presented under force of axis direction and vertical direction. The residual stress induced by the fabrication process of MEMS was considered in this model. The prediction curve agrees with the data of the experiment.更多还原