【摘要】 用磁控溅射法在玻璃基片上制备了具有等原子比组成的不同厚度的CoPt薄膜及不同Ag底层厚度的CoPt/Ag薄膜。真空退火后的结果表明,膜厚对CoPt薄膜的微观结构和磁性能有着重要的影响,膜厚较薄时(δ≤15nm)有利于易磁化轴(c轴)垂直于膜面取向,从而具有高的垂直磁各向异性;Ag底层可以诱导L10-CoPt相的形成并使c轴垂直择优取向,且Ag底层越厚其诱导效应越强。更多还原

【Abstract】 CoPt thin films with different thickness or different Ag under layer thickness were prepared by RF magnetron sputtering technique, then it was vacuum annealed. The magnetic properties and structures of the thin films were studied by XRD, XP-2 films detector, VSM . The results show that the (001) texturing has been achieved at lower thickness (δ≤15 nm), and their perpendicular coercivities were higher than in-plane ones. Then the (001) texturing deteriorates rapidly above 20 nm. L10-CoPt phase was easily obtained by introducing Ag under layers, and the (001) orientation can benefit from thick Ag under layer.更多还原