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HF-PCVD法TiO2纳米晶的粒径与晶型控制

Control of Particle Size and Crystal Phase of TiO2 Nanocrystalline Prepared by HF-PCVD

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【作者】 徐海萍； 孙彦平； 王俊文； 展红全； 陈新谋；

【Author】 Xu Haiping1, Sun Yanping1, Wang Junwen1, Zhan Hongquan1, Chen Xinmou2 (1.Taiyuan University of Technology, Taiyuan 030024, China) (2. S.J.Z. Development Areas Xinmou New Technique Corporation, Shijiazhuang 050091, China)

【机构】 太原理工大学； 石家庄开发区新谋新科技开发公司 山西太原； 030024； 山西太原； 河北石家庄； 050091；

【摘要】 以TiCl4和O2为反应体系,采用高频等离子化学气相沉积(HF-PCVD)法制备了晶化完整的锐钛和金红石混晶型TiO2纳米晶,球形体的晶粒分散性良好,分布较为均匀;研究了控制粒径大小和晶相组成的关键反应条件。XPS,TEM,XRD结果显示:增加TiCl4进料量、延长停留时间均利于锐钛相向金红石相转化,但粒径有所增大;添加AlCl3使金红石相含量较未掺杂时有较大幅度提高,且粒径随掺铝量增加而减小。本实验条件下,TiO2纳米晶的粒径为25nm~60nm,金红石相含量在12.0%~53.6%间可控。

【Abstract】 Taking TiCl4 and O2 as reaction system, TiO2 nanocrystallines were prepared by High Frequency Plasma Chemical Vapor Deposition, of which they were a mixture of anatase and rutile and fully-crystallized, the spherical particles were well-distributed. The key reaction conditions of controlling the particle size and crystal phase were discussed. XPS、TEM、XRD results showed that the rutile content in TiO2 particles increased with the increasing of TiCl4 feeding rates and protracting residence time, but the average particle size increased. The addition of AlCl3 influenced the form of TiO2 particles considerably, the particle size was reduced and the phase transformation was promoted to enhance the rutile content at the same time. In our experiments, the mean particle size is in the range from 25nm to 60nm and the content of rutile can be controlled from 12.0% to 53.6%.

【关键词】 HF-PCVD； TiO2纳米晶； 粒径； 晶型；
【Key words】 HF-PCVD； TiO2 nanocrystalline； particle size； crystal phase；
【基金】 国家自然科学基金资助(29776032);山西省科技攻关项目(202092)
  • 【文献出处】 稀有金属材料与工程 ,Rare Metal Materials and Engineering , 编辑部邮箱 ,2005年07期
  • 【分类号】TB383
  • 【被引频次】13
  • 【下载频次】145
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