【摘要】 采用静电力驱动方式的MOEMS光开关,从运动机制上来说,是由静电力矩、恢复力矩、空气压膜阻尼力矩以及重力力矩等条件共同作用的结果.对于微驱动器驱动条件的研究,不能单纯地从力矩平衡的角度来分析,应从动力学出发,才能较好地描述其运动过程,得到精确的驱动条件分析结果.本文从MOEMS倾斜下电极扭臂式光开关出发,介绍了动力学分析方法的过程.通过数值求解方程,得到器件的可动部分的运动速度等方面的结果,将其在不同驱动条件下的运动状态描述出来,从而达到确定光开关静电驱动条件的目的.更多还原

【Abstract】 This paper presents theoretical analysis on the dynamic response of a MOEMS optical switch with a slant lower electrode.Descriptive analytical formulae for the dynamic characteristic of the cantilever beam are derived.By solving the dynamic equation,the movement characteristics of the optical switch are described.From the computed results,a method of determining the critical actuating voltage is presented.This method is more accurate for the study of the MOEMS optical switch than previous ones.更多还原