【摘要】 在传感器敏感膜模型的基础上对电容式绝对压力传感器提出了一种改进模型,考虑了由于温度的变化电容结构空腔中残余气体对传感器性能产生的影响.结果表明温度的改变会导致残余气体压力的改变,进而使传感器的测量产生一定的温度漂移,同时也降低了传感器的灵敏度;并由此计算了残余气体存在时,传感器测量值的温度漂移量以及灵敏度的温度系数.这对于工艺的改进以及后续电路的设计具有指导意义.更多还原

【Abstract】 An improved model of capacitive abosolute pressure sensors is presented based on the model for pressure-sensing membrane of pressure sensor,and the effect of the sensor performance due to residual gas in the sealed cavities when temperature changes is considered.From the improved model we can get that the change of temperature leads to the change of pressure of the residual gas,which will cause the offset of temperature to the measurement of the sensor,and the sensibility will be reduced at the same time.Based on that,we calculate the amount of the offset of temperature in measurement of sensor and the coefficient of sensitivity when residual gas exists.These results will guide the improvement of technology and design of the subsequent circuit.更多还原