节点文献
多孔硅新的表面处理技术
New Surface Treatment Technique of Porous Silicon
【摘要】 对多孔硅施加阳极氧化表面处理技术 ,可有效解决多孔硅干燥时出现龟裂及坍塌 ,破坏原有多孔硅的形貌和本质的问题 .阳极氧化表面处理技术就是使用少量的负离子作用于多孔硅表面 ,满足SI分子化合价的需要 ,消除悬空键 ,促使多孔硅表面性能稳定 ,避免结构重组产生分子间的不均匀内应力 ,从而获得性能稳定、可靠、在空气中可以长期干燥保存的多孔硅 .
【Abstract】 Using the anode oxidation surface treatment technique on PS introduced can efficiently avoid the PS to crack,shrink or collapse during the natural drying process. The anode oxidation surface treatment means to use a few negative ions to effect the PS surface,to clear up dangling bonds and to satisfy the chemical valence of Si molecules,so as to avoid the asymmetry inner stress between the molecules caused by restructure and to make the PS surface performance stable.Thus the PS with steady performance which can exist in the air for a long time can be prepared.
【Key words】 cathode deoxidization; anodic oxidation; surface treatment technique; porous silicon;
- 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,2005年02期
- 【分类号】TN304
- 【被引频次】16
- 【下载频次】322