【摘要】 设计了一种基于体微机械加工技术的新型音叉式微机械陀螺 .该陀螺在驱动模态和检测模态的空气阻尼均为滑膜阻尼 ,有效提高了微机械陀螺的Q值和灵敏度 ,同时降低了陀螺的热机械噪声 .对陀螺噪声特性进行的分析表明 ,该陀螺具有相对很低的热噪声 .制作了陀螺芯片 ,并测试了其机械性能和噪声特性 .结果表明 ,该陀螺的噪声谱密度不超过 6 0 μV/Hz,灵敏度为 10mV/(°·s-1) .该微机械陀螺有望实现较高的角速度分辨率更多还原

【Abstract】 A novel tuning fork micromachined gyroscope,based on bulk micromachining technology,is presented.Slide-film damping plays an important role in this sensor,which enables it to achieve high Q-values and sensitivity and low thermal noise.The analysis shows that this sensor has lower thermal noise.The performance of the sensor is tested.The sensitivity is 10mV/(°·s -1),and the white noise and 1/f noise are less than 60μV/Hz.The sensor has shown its potential to achieve high performance.更多还原