【摘要】 介绍了一种新型3D静电驱动微镜结构,对结构的下电极形状进行了改进,分析和比较了它们的几何参数与驱动电压之间的关系。通过理论分析表明,在其他几何参数一致的情况下,方形下电极单极板微镜结构的驱动电压比1/4圆形下电极单极板微镜结构的驱动电压小。更多还原

【Abstract】 A new 3D-structure micromirror driven by electrostatic is introduced and the shape of low electrode is optimized. Relations between structural geometry parameters and drive voltage are analyzed and compared. The result is that the drive voltage of quadrate single-electrodes structure is lower than that of quarter circular single-electrode structure on the condition of same other geometry parameters.更多还原